{"product_id":"run-to-run-control-in-semiconductor-manufacturing-9781351836128","title":"Run-to-Run Control in Semiconductor Manufacturing","description":"\u003cp\u003eRun-to-run (R2R) control is cutting-edge technology that allows modification of a product recipe between machine \"runs,\" thereby minimizing process drift, shift, and variability-and with them, costs. Its effectiveness has been demonstrated in a variety of processes, such as vapor phase epitaxy, lithography, and chemical mechanical planarization. The only barrier to the semiconductor industry's widespread adoption of this highly effective process control is a lack of understanding of the technology. Run to Run Control in Semiconductor Manufacturing overcomes that barrier by offering in-depth analyses of R2R control.\u003c\/p\u003e\u003ch3\u003eAbout the Author\u003c\/h3\u003e\u003cp\u003eJames Moyne, Enrique del Castillo, Arnon M. Hurwitz\u003c\/p\u003e\u003ctable\u003e\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eAuthor\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eJames Moyne (Editor), Enrique del Castillo (Editor), Arnon M. Hurwitz (Editor)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eISBN-13\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e9781351836128\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003ePublisher\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eCRC Press\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003ePublication Date\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e10\/08\/2018\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003ePage Count\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e368 pages\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\u003c\/table\u003e","brand":"CRC Press","offers":[{"title":"book","offer_id":50588746678434,"sku":"9781351836128","price":49.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0732\/7059\/1650\/files\/9781351836128_p0.jpg?v=1791548820","url":"https:\/\/styleando.com\/products\/run-to-run-control-in-semiconductor-manufacturing-9781351836128","provider":"styleando","version":"1.0","type":"link"}